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SEMI  C6.3
1989-JAN-01 • 现用 •
PARTICLE SPECIFICATION FOR GRADE 20/0.2 HYDROGEN (H2) DELIVERED AS PIPELINE GAS
 
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描述[文件摘要]

This document applies only to hydrogen gas delivered through pipelines; it is not applicable to cylinder gases or gases in their liquid state.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

The purposes of this document are (1) to set a maximum permissible particle concentration for Grade 20/0.2 hydrogen gas and (2) to describe a reference method for its verification.




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