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SEMI  F33
2008-JUL-01 • 现用 •
TEST METHOD FOR CALIBRATION OF ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETER (APIMS)
 
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描述[文件摘要]

This method applies to the analyte calibration of the APIMS for a target impurity range of 100 ppt to as high as 200 ppb impurity range. The actual calibration range should bracket the impurity measurement range of interest, dependent upon the measurement to be conducted. Anything else is outside the range of the calibration.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

This test method may provide guidelines for the calibration of the APIMS for measurement of impurities in nitrogen, argon, helium and hydrogen. APIMS is currently the technique of choice for measurements of low level impurities in gas distribution systems and components because it is essentially the only commercially available method capable of ppt impurity analysis and it has a superior response time. This method may provide guidelines for application of other techniques with similar detection limits and response time to APIMS which may not be commercially available at this time.




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