Outlined in this document are both bulk and specialty gas distribution systems.

Components and subcomponents are identified from the point-of-supply to the point-of-connection to the process tool.

This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety health practices and determine the applicability or regulatory limitations prior to use

Purpose

This reference document is intended to outline for the user the common systems configurations, components, and subcomponents of high purity gas distribution systems in a semiconductor fabrication facility. Related specifications are also noted.