This guideline is intended to establish a common basis for communication between users and suppliers of semiconductor equipment. It provides terminology and methodology aimed at eliminating confusion regarding what previously has been referred to as MFC "response time." The conditions and procedures are given for determining and expressing the transient characteristics of a mass flow controller (MFC) to a step change in set point. This guideline applies to mass flow controllers for gases used in semiconductor fabrication equipment.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.