描述[文件摘要]

Model Structure and Functions

This document recognizes EFEM as a component of semiconductor manufacturing equipment. It creates an EFEM functional structure model to clearly describe EFEM, its functional elements, and the functions of each functional element. The functional structure model includes the following:

1) definition of functional elements that constitute EFEM,

2) definition of functions of functional elements, and

3) hierarchical description of functional elements.

For clarity, Fixed Buffer Type EFEM and Internal Buffer Type EFEM (see Terminology) are represented as independent functional structure models in this document.

Preconditions for Modeling

The models are created under the following conditions:

1) Modeling should be restricted to SEMI E15.1, Option 1, Options 2 and 3, and Option 3 types. (See SEMI E15.1, Figure 2 (Load Port Options)).

2) The model supports handling of open cassette (OC), and Front Opening Unified Pod (FOUP) (see Terminology).

3) The model is created for the maximum structure including options.

4) Functional elements that have interfaces with EFEM are also included in the model.

NOTE 1: Functional elements that don't belong to EFEM, but are important in defining interfaces among the functional elements, are represented in this model to clarify their functional positions and attributes in the entire equipment.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

Productivity improvement is the task with the highest priority in semiconductor factories of the 300 mm generation, and computer-integrated manufacturing or factory automation (CIM/FA) technologies become more and more important to accomplish it. The standardization of these technologies is also necessary to provide the CIM/FA infrastructure in a short period of time at a low cost. Since the standards will have to cover a wide range of production equipment, communication hardware, and software tools, it is very important that the standards have a high degree of compatibility. In order to improve the compatibility, this guide provides a functional structure model of an Equipment Front End Module (EFEM) that handles carriers and substrates at the interface between the factory material handling system and the process equipment.

The major purposes of this guide are as follows:

1) provide a common understanding of functions of EFEM (Equipment Front End Module) and associated interfaces between functional elements (components with particular function roles),

2) provide a common understanding of the hierarchical structure of functions and their interfaces in an EFEM,

3) provide a common understanding of possible units used for maintenance, adjustment, and control, and

4) provide a map between EFEM functional elements and existing standards.