This guideline applies to UTV systems used in semiconductor manufacturing.

This guideline addresses both floor-traveling and space-traveling UTV systems. Floor-traveling vehicle systems include automatic guided vehicle (AGV) systems and rail guided vehicle (RGV) systems. Spacetraveling vehicle systems include interbay overhead transport vehicle systems and intrabay overhead hoist transport vehicle (OHT) systems.

Evaluations for conformance to this document should include all equipment that is provided by the UTV system supplier including separate items such as rails, control panels, power panels, and any other type of equipment necessary for operation of the unmanned transport vehicles.

This safety guideline does not purport to address all of the safety issues associated with its use. It is the responsibility of the users of this guideline to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Purpose

These guidelines are intended as a set of environmental, safety, and health considerations for unmanned transport vehicle (UTV) systems. UTV systems are used to automate the movement of material within semiconductor factories. Unmanned transport vehicle systems include both floor-traveling vehicle systems and space-traveling vehicle systems.