This guide is intended to promote interoperable application of XML in a variety of semiconductor manufacturing usage contexts. It addresses an approach for the usage and definition of XML specifications within the semiconductor industry with the focus on the use of XML in future SEMI standards. These guidelines should be applied to any XML document or schema generated as part of a SEMI standard for communication between software entities. This guide includes the following:

Overview of XML Resources, Organizations, and Standards,

XML Three Tier Model Architecture, and

General and specific recommendations of XML style and usage.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

The inclusion of XML (Extensible Markup Language) notation within current SEMI standards reflects the industry's growing interest in XML technology. This guide is the first step to prepare for XML protocols in SEMI standards and to establish consistency in XML style and usage. Recommendations given in this document are intended for the definition and conformance of XML based standards. This document also attempts to highlight those areas where standardization and further work may be required.