This standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and inter-changeability at all mechanical interfaces. Only the bottom half of the kinematic coupling is specified so that suppliers can be flexible in designing wafer carriers that can mate with it.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

This standard specifies the mechanical couplings used to ergonomically align and precisely support 300 mm wafer carriers (including transport cassettes, process cassettes, quartz boats, pods, lot boxes, and shipping boxes). Such a kinematic coupling can be used at several interfaces, including:

• between a box or cassette and a tool load-port or vehicle nest,

• between a transport cassette and a box, and

• between a process cassette or quartz boat and the floor of a process chamber.