描述[文件摘要]

This specification provides the common interfaces required by Manufacturing Execution Systems for runtime interactions between the factory (as represented by other CIM Framework components) and the Material Tracking and Storage Component. Some interfaces supporting configuration and tracking of the material transport and storage equipment are the responsibility of the Equipment Tracking and Maintenance component of the CIM Framework. These interfaces are complementary to the interfaces of Transport Machines and Storage Machines presented in this specification.

The responsibilities of the Material Transport and Storage Component include interfaces that

• Support scheduling of material transport and processing by predicting time for material delivery to specific locations. NOTE: The interfaces for delivery time prediction are deferred as one of the deficiencies noted in this provisional specification

• Execute and monitor transport jobs to move material to specific locations.

- Validate that the job can be done: the material is available, the destination is reachable and has available storage or loadport capacity, and there are sufficient material movement resources (cars, storage space, etc.) to implement the job.

- Request operations from AMHS equipment controllers to enact internal material movement and storage actions. Implementations of the Material Transport and Storage Component will use lower level standards such as IBSEM and StockerSEM for communication with equipment that performs the physical movement and storage actions.

- Collect and record data on transport job execution and history.

- Capture, record, interpret, and respond to equipment events and fault detection.

- Generate MES-level job status events and material location change events.

• Record and report on material locations and material transport histories for material in the system

• Interact with machine and port interfaces for material hand-off handshake protocols.

Automated Material Handling Systems (AMHS's) are an important part of any semiconductor factory and have, typically, been implemented and integrated with a Manufacturing Execution System (MES) as a separate logical software entity. An AMHS is made up of the AMHS Framework, the system controllers for AMHS equipment (the software) and the transport and storage machines (the hardware). In keeping with this tradition, the CIM Framework views the AMHS as a "black box" where the interface into that system is visible, but the inner workings and control of that system is the responsibility of the AMHS supplier and not in the domain of the MES. The CIM Framework specifies the Material Transport and Storage Component (MTSC) as the MES level interface to AMHS capabilities.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

Wafer fabrication factories will require the baseline capabilities of stocker storage and interbay transport. In addition to these baseline capabilities, intrabay transport will be added as a result of ergonomic and safety requirements brought about by the increased size and weight of 300 mm wafer carriers. These stocker, interbay transport, and intrabay transport systems will be required to be fully integrated with each other and the factory Manufacturing Execution System (MES) in order to realize the full vision of cost effective automated material transport to and from production equipment.

A baseline requirement of Automated Material Handling System (AMHS) equipment is efficient integration with the factory MES. Therefore, the purpose of this specification is to enable cost effective integration of interoperable AMHS systems, as illustrated in Figure 1. Manufacturers require a SEMI standard which specifies the visible behavior of the AMHS Integration system and its interface to the factory MES. The purpose of this standard is to specify these interfaces and the interactions between MES and AMHS systems as a part of the CIM Framework. While the term AMHS is commonly used to refer to a wide range of equipment and systems that support automated material handling, the CIM Framework specifies a software component called "Material Transport and Storage Component (MTSC)" which represents the standard interface of the MES to the complete suite of AMHS capabilities.