This document describes how the SEMI standards for 300 mm physical interfaces and carriers work together. This document also clarifies the requirements (direct and indirect) on suppliers of each product, and suggests how users see these standards and options.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

This document is intended to help users and suppliers of 300 mm carriers and production equipment to understand the complex interdependencies among the SEMI standards for 300 mm physical interfaces and carriers and to determine which standards apply to which products. As shown in Figure 1, these standards are highly inter-related, have many complex dependencies, and inherit a numbering system (from legacy 200 mm standards) that is non-intuitive.