This guideline applies to semiconductor manufacturing equipment that incorporates exhaust ventilation intended to be connected to user facilities' exhaust ventilation system(s).

The criteria of this document should be applied to exhaust ventilation systems provided for the purposes (in whole or in part) of personnel protection, equipment protection, and fire risk reduction.

The performance and assessment criteria in this document apply to all of the equipment provided by a supplier to a user or to another supplier to be provided as part of equipment the latter supplier provides to a user.

This document is intended to help the semiconductor equipment supplier design equipment exhaust ventilation systems to a common set of performance criteria as well as to provide assistance to both users and suppliers in the understanding of exhaust ventilation requirements for equipment systems. It is not intended to establish design specifications.

NOTE 1: Design suggestions for several applications of exhaust ventilation are provided as Related Information.

Test methods are provided in § 8 and several appendices.

This document is not intended to limit hazard evaluation methods or control strategies (e.g., design principles) employed by suppliers or users. Many different methods may be employed if they provide a sufficient level of protection.

Purpose

This safety guideline provides safety performance criteria for exhaust ventilation of semiconductor manufacturing equipment (SME) and test methods for assessing conformance to those criteria.

The optimization of exhaust ventilation is becoming more important as energy efficiency and the physical constraints of exhaust ventilation utilities in user facilities become more pronounced. Efficiently designed exhaust ventilation should be provided to protect personnel, property, and the environment from health and safety risks. The purpose of this safety guideline is to provide performance and design principles and test methods and criteria for exhaust ventilation.