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SEMI  F92
2004-MAR-01 • 现用 •
SPECIFICATION FOR DIMENSION OF COMPACT SIZE THREE PORT COMPONENTS FOR 1.5 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
 
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描述[文件摘要]

This document includes common requirements, layout, size, detailed specifications, and dimensions of the components.

This standard applies to all compact size three port two fastener components. The components (i.e. valves, pressure regulators, pressure transducers, filters and purifiers) are mounted on substrates with fasteners accessible from the top.

This standard only applies to components, which control flow of = 50 slm nitrogen equivalent at 308 kPa (44.7 psia). This standard also only applies to components with operating pressures less than 3445 kPa (500 psia) at 20°C.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

This standard establishes the properties and physical dimensions of two port components for 1.5 inch type surface mount gas distribution systems.




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