The scope of this standard is limited to identifying key EQIPs for select equipment process types, specifying that the equipment shall indicate a non-null list of settable process program parameters that impact each of these EQIPs, and specifying that the equipment shall allow individual actuation of each of these parameters using SEMI standard methods. The standard is not intended to identify all quality parameters. It is not intended to specify a complete set of equipment types.

While this standard requires that a capability shall exist for actuation of process program parameters to influence key EQIPs, the standard does not specify how this actuation will take place. For example, it does not define the communication protocol for actuation or the equipment or host models that will support and enable this actuation capability. The scope is limited to defining the key EQIPs and their linking to process program parameters.

The standard is structured so that EQIPs for equipment types may be added to an existing set, as the community reaches consensus on these additions. Further, EQIPs may be defined for a new equipment type not previously addressed in this standard. Additions to the standard are made utilizing the SEMI standards balloting process.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

This standard identifies key equipment quality information parameters, or EQIPs, for equipment process types or groups. The identification of these quality parameters is intended to help equipment users and suppliers specify and utilize capabilities for process control.

This standard is designed to be updated as EQIPs are identified for new and/or existing equipment process types in this standard.

Intended Audience — This standard is intended for use by OEMs, users, and third party equipment and process control system suppliers who need to achieve equipment and process control of select process quality parameters, utilizing standardized methods for actuation of process control parameters.