This specification may be applied to equipment that is compliant to SEMI E30 (GEM). However, it is also intended that this standard will be useful for future generation equipment interfaces that supercede SEMI E30, such as SEMI E53.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

This specification describes equipment provided services to the factory that supports a high level of factory automation. These services provide capabilities for the host to coordinate processing and disposition of materials on production equipment.