描述[文件摘要]

This guide is intended to be a tool that can be used to analyze energy, utilities and materials conservation on semiconductor manufacturing equipment.

This guide describes methods for reporting energy, utilities and material use rate, and the consumption reduction in semiconductor manufacturing equipment.

This guide also suggests use of energy equivalent values in order to facilitate quantification of overall energy consumption and conservation related to SME as well as easy planning of energy conservation.

This guide focuses only on the use stage of equipment life cycle and addresses a limited set of utilities and materials to be considered.

Additionally, this guide describes setting targets for, verifying and improving utilities and materials use rate and energy conservation.

This guide contains the following sections:

• Purpose

• Scope

• Limitations-

• Referenced Standards and Documents

• Terminology

• General Concepts

• Life Cycle Assessment (LCA) of Energy Usage

• Baseline Process(es)

• Utilities and Materials Use rate Measurement

• Conversion Factors for Equivalent Energy

• Target Setting and Improvement

• Monitoring and Reporting

• Related Documents

NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

This guide addresses concepts related to energy, utilities and materials conservation on semiconductor manufacturing equipment.

This guide addresses measurements related to energy, utilities and materials usage on semiconductor manufacturing equipment.

This guide also addresses continuous improvement planning for energy, utilities and materials usage on semiconductor manufacturing equipment in order to promote energy, utilities and materials conservation.

This guide is a series of options and instructions intended to increase awareness of the reader to available techniques in the area of energy, utilities and materials conservation. A particular course of action is suggested for utilities and materials use measurement and conversion of use measurements into equivalent energy.

NOTE 1: Because this SEMI standard is a Guide, all criteria using "should" may be considered optional.