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SEMI  D15
1996-DEC-01 • 现用 •
FPD GLASS SUBSTRATE SURFACE WAVINESS MEASUREMENT METHOD
 
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描述[文件摘要]

This test method is applicable to the documentation of waviness of all types of glass substrates used for flat panel displays.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

This document covers the measurement of FPD glass substrate surface waviness by measuring instruments employing mechanical stylus, optical stylus, and optical interferometric measurement methods.




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