This standard classification is to be used in the specification of semiconductor clean environments (including process tool environments) and of contamination control and measurement equipment performance.

This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety health practices and determine the applicability or regulatory limitations prior to use.

Purpose

The purpose of this standard is to classify microelectronics clean environments with respect to their molecular (non-particulate) contaminant levels. This standard classification provides a consistent means of communicating acceptable contaminant levels of groups of specific airborne molecular contaminants. See Related Information 1 appended to this standard.