This guideline is intended for preparation of binary gas mixtures using individual cylinders.

It is the intent of this document to provide general guidelines for preparation of calibration gas mixtures in compliance with ISO 6142, with additional requirements to meet the needs of the semiconductor industry.

This guideline is applicable only to gaseous components which do not react between themselves or with the cylinder walls, and to condensable components which are totally vaporized under the test conditions. It not intended for moisture calibration mixtures.

This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety health practices and determine the applicability or regulatory limitations prior to use.

Purpose

This document is intended to provide the minimum criterion for the analysis of uncertainty associated with preparation and use of gravimetric gas mixtures used for calibrating analytical instruments to determine whether various SEMI impurity specification are satisfied.