The scope of this document lists the proposed impurity limits of 25% tetramethylammonium hydroxide used in the semiconductor industry.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

The purpose of this document is to provide guidelines for grades of 25% tetramethylammonium hydroxide for which a need has been identified.