This guide is applicable to any type of equipment for processing semiconductor units, which may be wafers, devices, flat panels, or other material. Some terms are specialized to integrated circuit wafer and device production.

Effective use of the metric to build a COO model requires identification of constraints and data values. Where possible, use direct values for inputs rather than deriving them from secondary models or using example values.

NOTE 2: Related Information 2 provides some example data.

Full calculation of COO often requires data held proprietary and is coupled to the overall factory yield and the related cost of yield loss. It is envisioned that this guide will be used for internal factory and equipment optimization, investment evaluation, and equipment design improvements.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

The purpose of this guide is to provide standard metrics for evaluating unit production cost effectiveness of manufacturing equipment in the semiconductor industry.

This guide establishes a procedure to facilitate an understanding of equipment-related costs, including costs related to environmental, health and safety (EHS) factors, by providing definitions, classifications, algorithms, methods, and default values necessary to build a comprehensive, constrained, or monitor cost of ownership (COO) calculator.

NOTE 1: Related Information 1 provides a graphical representation of calculating COO to expand upon the guide text.