It is preferable that design, manufacture and purchase specifications for CD-SEM magnification references conform to this guideline.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

The purpose of this guide is (1) to define common and important specifications of magnification references which are used for calibrating magnifications of critical dimension measurement scanning electron microscopes (CD-SEMs), and as the result (2) to provide magnification references which are easy for anyone to use.